Nebulization is an inhaled mist via compressed air using ultrasonic technology. Wiki has a good bit on it: "The definition of an aerosol is a "mixture of gas and liquid particles," and the best example of a naturally occurring aerosol is mist, formed when small vaporized water particles mixed with hot ambient air are cooled down and condense into a fine cloud of visible airborne water droplets."
My take on it: Vaporizing, vaping, vaped. Vape is an elegant verb. The word is way more generic than nebulization or volitization. Those two appear to be specialized processes than involve vaporizing as a small part in one of the many steps.
It would be neat to have a vaporizer with a built-in microscope. Imagine being zoomed in on globes of viscous liquid and seeing the phase transition.
I do not believe sublimation is a generic enough term to describe what is happening. Glandular trichomes convert to true liquid with very little heat at all (you can do it with your thumb and index finger). It appears that glandular trichomes are in "viscous liquid" form. According to that enthalpy chart, sublimation can only occurs when dealing with solids (herb material, mold, other ingredients). This would exclude the main course, i.e. perfectly formed soaking wet globes of viscous liquid.
"Atomization" is the most correct term. This is a far more generic term than "vaporization". Any time you vape, you are "atomizing". But atomizing has a ton of other different meanings, not always related to vapor. Another way to put it: All vaporizers are atomizers, but not all atomizers are vaporizers.